BALD Engineering AB

Born in Finland, Born to ALD

Virtual Project on the History of ALD (VPHA)


The Virtual Project on the History of ALD is a worldwide collaborative effort, carried out in atmosphere of openness, respect and trust - anyone welcome to attend!

VPHA main links:

Introduction and Invitation to participate

LinkedIn ALD history group

Publication Plan v2

VPHA files

VPHA Open Introduction

One-slide advertisement shown at AVS-ALD 2013

Abstract published at Baltic ALD

Essay on Tuomo Suntola's Atomic Layer Epitaxy in press in Chem. Vap. Deposition [to be updated]


Other ALD history presentations/blog posts:

Friday, February 21, 2014 The Virtual Project on the History of ALD (VPHA) are looking for more contributors

Monday, May 26, 2014 T. Suntola, "From ideas to global industry" BALTIC ALD, May 12-13, 2014, University of Helsinki

Saturday, May 31, 2014 Exhibition: 40 Years of ALD in Finland - Photos, Stories


Suntola presentation at Baltic ALD: "40 Years of ALD in Finland - from ideas to global industry"

Malygin presentation [to be updated]

Suntola presentation at AVS-ALD 2004: "30 Years of ALD"

Twitter: search with #ALDep & #VPHA




AVS ALD 2014 in Kyoto Japan - Tutorial & Workshop

June 15th 2014, Sunday

16:20-17:10 ALD History

by Riikka Puurunen, VTT, Finland


AVS ALD 2014 Poster Session

June 16th Monday, 18:00‐20:00

16P003 On the Early History of ALD: Molecular Layering

Riikka Puurunen et al., VTT Technical Research Centre of Finland, Finland


ALD Symposium at SEMICON Europa 2014, Grenoble France

Originally built for Baltic ALD in May, Helsinki, the exhibition

"40 Years of ALD in Finland: Photos, Stories" will travel to the ALD symposium

at Semicon Europa, Grenoble, 7 Oct 2014